Effects of amplitude modulated discharge on growth of nanoparticles in TEOS/O₂/Ar capacitively coupled plasma

We investigate the effects of amplitude modulation (AM) discharge method on growth nanoparticles and relation between plasma generation in tetraethylorthosilicate (TEOS)/O2/Ar plasma. The laser-light scattering (LLS) intensity, which is proportional to density sixth power size Rayleigh regime, decreases by 18% at an AM level 10% 60% 50%. On other hand, ArI emission roughly density, higher than that for continuous wave discharge. Thus, discharges suppress TEOS have shown oscillations axial electric field Ez with frequency measurement using electro-optic probe. discussed these fluctuations mainly lead vertical oscillation levitation position trapped sheath boundary region taking into account force balance equation direction negatively charged nanoparticles.